Skip to main content
SpringerLink
Log in

Vapor-Phase Deposited Polymer Dielectric Layers for Organic Electronics: Design, Characteristics, and Applications

  • Review Article (invited only)
  • Published:
Korean Journal of Chemical Engineering Aims and scope Submit manuscript

Abstract

The emergence of organic electronics has transformed the landscape of electronic devices, paving the way for future advancements in low-power, flexible, and wearable electronics compatible with various form factors. Polymeric dielectric layers are pivotal in the implementation of organic electronics due to their inherent deformable characteristics as well as outstanding insulating performance. Here, the review highlights an innovative technology termed initiated chemical vapor deposition (iCVD) for synthesizing polymer dielectric materials, particularly in the context of organic thin-film transistors (OTFTs). The all-dry polymer deposition process circumvents issues associated with conventional solvent-based methods, such as residual solvent, potential damage to the substrate, and the lack of large-area uniformity, allowing for ultra-thin, high-purity polymer dielectric layers with exceptional dielectric performance comparable to inorganic dielectrics. Furthermore, iCVD process enables the incorporation of various chemical functionalities into the dielectric layer, which enables the generation of versatile, high-performance organic electronic devices. Based on the beneficial aspects of the iCVD process, the review provides an overview of iCVD polymer dielectric layers, emphasizing their significance and potential toward innovative applications in the fields of organic electronic, including OTFTs, resistive random-access memory (RRAM), flash memory and logic circuits.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2

Reproduced with permission from Ref. [5], Copyright 2015, Springer Nature. d Schematic of fabricated OTFTs with the iCVD dielectrics (pEGDMA, pIBA, pPFDA). e The Ji measured at 3 MV cm−1 for various tensile strain values for pIBA, pEGDMA, and pPFDA layers. The inset photograph shows the set-ups for bending test of MIM devices on PEN substrate. Reproduced with permission from Ref. [6], Copyright 2015, Wiley–VCH GmbH. f Transfer characteristics of C60 OTFTs using the series of copolymer dielectrics without the interfacial layer. g Transfer characteristics of C60 OTFTs using the series of copolymer dielectrics with the interfacial layer. The arrow denotes the increasing VI fraction. h Mobility (left axis) and VT (right axis) as a function of VI content in the copolymer dielectrics with the interfacial layer. Reproduced with permission from Ref. [20], Copyright 2016, Wiley–VCH GmbH

Fig. 3

Reproduced with permission from Ref. [21], Copyright 2017, American Chemical Society. c Estimation of dielectric constant of CEA copolymer dielectrics varying mole fraction of crosslinker DEGDVE and BDDVE. Reproduced with permission from Ref. [22], Copyright 2020, Wiley–VCH GmbH. d Image of molecular thin hydrophobic skin layer of bulk high-k dielectric enabled by all-dry, vapor-phase process. Reproduced with permission from Ref. [23], Copyright 2019, American Chemical Society

Fig. 4

Reproduced with permission from Ref. [24], Copyright 2023, Springer Nature

Fig. 5

Reproduced with permission from Ref. [101], Copyright 2015, American Chemical Society. g Structure of flexible pV3D3 RRAM as electronic synapse. h Reset performance of the flexible pV3D3 RRAM following the creation of a Cu filament using a Icc of 10–5 A. i Reset performance of the flexible pV3D3 RRAM with a thin filament produced through the gradual Icc increase approach. Reproduced with permission from Ref. [106], Copyright 2019, American Chemical Society. j Initial and 200th I-V characteristics of the flexible pV3D3 RRAM observed through repetitive DC voltage sweeps. k I–V characteristics of the flexible pV3D3 RRAM before and after bending. l I–V characteristics of the flexible pV3D3 RRAM before and after the submerged duration of 30 h in water. Reliability indicated by intra-HD of pV3D3 RRAM in response to both m flexibility test and n humidity-resistant test. Reproduced with permission from Ref. [112], Copyright 2022, Wiley–VCH GmbH

Fig. 6

Reproduced with permission from Ref. [119], Copyright 2017, Springer Nature. d Schematic device structure of the proposed flash memory and TEM image. e Chemical structures of the pV3D3 and the pEGDMA used as TDL and BDL, respectively. f A photograph of the organic memories deposited on paper substrate. Reproduced with permission from Ref. [125], Copyright 2017, Wiley–VCH GmbH. g A schematic diagram of the memory with the trilayer dielectric composed of pV3D3 TDL, p(BDDA-co-HEA) CTL, and pBDDA BDL. Characteristics of the p(BDDA-co-HEA) layer. h Memory characteristics of the flexible memory on a PEN substrate under the applied tensile strain of 2.72%. i Retention characteristics depending on fraction of HEA in CTL. Reproduced with permission from Ref. [7], Copyright 2020, Wiley–VCH GmbH

Fig. 7

Reproduced with permission from Ref. [149], Copyright 2020, IEEE. d Schemetic of a 5-layer 3D-stacked OTFT. (e) Cross-sectional SEM images of 3D OTFT, scale bar, 1 μm, and f interconnected metal electrodes, scale bar, 400 μm. g On-current values and on/off current ratio of 5 3D-OTFTs. Reproduced with permission from Ref. [18], Copyright 2019, Springer Nature. h 3-dimensional ternary logic inverter (3D T-inverter) fabrication method, and i circuit schematic. (j) Operating principle when the organic flash memory is programmed, and k corresponding transfer characteristic of the 3D T-inverter. Transient measurement results of 3D T-inverter with l pristine and m programmed states. Reproduced with permission from Ref. [163], Copyright 2022, Springer Nature

Fig. 8

Reproduced with permission from Ref. [169], Copyright 2024, Springer Nature

Similar content being viewed by others

Data Availability

Data sharing is not applicable to this article as no new data were created or analyzed in this study.

References

  1. T. Someya, Z. Bao, G.G. Malliaras, Nature 540, 379 (2016)

    Article  CAS  PubMed  Google Scholar 

  2. K. Myny, Nat. Electron. 1, 30 (2018)

    Article  CAS  Google Scholar 

  3. A.F. Paterson, S. Singh, K.J. Fallon, T. Hodsden, Y. Han, B.C. Schroeder, H. Bronstein, M. Heeney, I. McCulloch, T.D. Anthopoulos, Adv. Mater. 30, 1801079 (2018)

    Article  Google Scholar 

  4. H. Bronstein, C.B. Nielsen, B.C. Schroeder, I. McCulloch, Nat. Rev. Chem. 4, 66 (2020)

    Article  CAS  PubMed  Google Scholar 

  5. H. Moon, H. Seong, W.C. Shin, W.T. Park, M. Kim, S. Lee, J.H. Bong, Y.Y. Noh, B.J. Cho, S. Yoo, S.G. Im, Nat. Mater. 14, 628 (2015)

    Article  CAS  PubMed  Google Scholar 

  6. H. Seong, K. Pak, M. Joo, J. Choi, S.G. Im, Adv. Electron. Mater. 2, 1500209 (2016)

    Article  Google Scholar 

  7. C. Lee, K. Pak, J. Choi, M. J. Kim, B. J. Cho, S. G. Im, Adv. Funct. Mater. 30, 2004665 (2020)

  8. K. Pak, J. Choi, C. Lee, S.G. Im, Adv. Electron. Mater. 5, 1800799 (2019)

    Article  Google Scholar 

  9. K.K. Gleason, Nat. Rev. Phys. 2, 347 (2020)

    Article  CAS  Google Scholar 

  10. A.M. Coclite, R.M. Howden, D.C. Borrelli, C.D. Petruczok, R. Yang, J.L. Yague, A. Ugur, N. Chen, S. Lee, W.J. Jo, A. Liu, X. Wang, K.K. Gleason, Adv. Mater. 25, 5392 (2013)

    Article  CAS  PubMed  Google Scholar 

  11. K.K. Gleason, Adv. Mater. 36, e2306665 (2024)

    Article  PubMed  Google Scholar 

  12. J. Choi, K. Choi, Y. Kwon, D. Kim, Y. Yoo, S.G. Im, D.Y. Koh, Nat. Commun. 15, 2800 (2024)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  13. Y. Kim, J. Kim, C.Y. Kim, T. Kim, C. Lee, K. Jeong, W. Jo, S. Yoo, T.-S. Kim, K.C. Choi, Chem. Eng. J. 431, 134074 (2022)

    Article  CAS  Google Scholar 

  14. K. Jeong, D. Kim, D. Ahn, C. Yang, J. Kim, C. Lee, Y. Kim, C. Lee, Y.-S. Park, S.-H. Lee, Chem. Eng. J. 480, 148151 (2024)

    Article  CAS  Google Scholar 

  15. J.M. Yu, C. Lee, D.J. Kim, H. Park, J.K. Han, J. Hur, J.K. Kim, M.S. Kim, M. Seo, S.G. Im, Adv. Funct. Mater. 31, 2010971 (2021)

    Article  CAS  Google Scholar 

  16. J.-M. Yu, C. Lee, J.-K. Han, S.-W. Lee, M.-S. Kim, S.G. Im, Y.-K. Choi, IEEE Trans. Electron Dev. 69, 4231 (2022)

    Article  CAS  Google Scholar 

  17. J.-M. Yu, C. Lee, J.-K. Han, S.-J. Han, G.-B. Lee, S.G. Im, Y.-K. Choi, J. Mater. Chem. C 9, 7222 (2021)

    Article  CAS  Google Scholar 

  18. H. Yoo, H. Park, S. Yoo, S. On, H. Seong, S.G. Im, J.J. Kim, Nat. Commun. 10, 2424 (2019)

    Article  PubMed  PubMed Central  Google Scholar 

  19. S.C. Yang, J. Choi, B.C. Jang, W. Hong, G.W. Shim, S.Y. Yang, S.G. Im, S.Y. Choi, Adv. Electron. Mater. 5, 1800688 (2019)

    Article  Google Scholar 

  20. K. Pak, H. Seong, J. Choi, W.S. Hwang, S.G. Im, Adv. Funct. Mater. 26, 6574 (2016)

    Article  CAS  Google Scholar 

  21. J. Choi, M. Joo, H. Seong, K. Pak, H. Park, C.W. Park, S.G. Im, A.C.S. Appl, Mater. Interfaces 9, 20808 (2017)

    Article  CAS  Google Scholar 

  22. J. Choi, J. Kang, C. Lee, K. Jeong, S.G. Im, Adv. Electron. Mater. 6 (2020).

  23. J. Choi, J. Yoon, M.J. Kim, K. Pak, C. Lee, H. Lee, K. Jeong, K. Ihm, S. Yoo, B.J. Cho, H. Lee, S.G. Im, A.C.S. Appl, Mater. Interfaces 11, 29113 (2019)

    Article  CAS  Google Scholar 

  24. J.H. Koo, J. Kang, S. Lee, J.-K. Song, J. Choi, J. Yoon, H.J. Park, S.-H. Sunwoo, D.C. Kim, W. Nam, Nat. Electron. 6, 137 (2023)

    Article  CAS  Google Scholar 

  25. K.-H. Choi, D.B. Ahn, S.-Y. Lee, ACS Energy Lett. 3, 220 (2017)

    Article  Google Scholar 

  26. D. Braga, G. Horowitz, Adv. Mater. 21, 1473 (2009)

    Article  CAS  Google Scholar 

  27. J. Choi, C. Lee, J. Kang, C. Lee, S.M. Lee, J. Oh, S.Y. Choi, S.G. Im, Small 18, e2203165 (2022)

    Article  PubMed  Google Scholar 

  28. J.S. Kwon, H.W. Park, D.H. Kim, Y.J. Kwark, A.C.S. Appl, Mater. Interfaces 9, 5366 (2017)

    Article  CAS  Google Scholar 

  29. S. Logothetidis, Mater. Sci. Eng. B 152, 96 (2008)

    Article  CAS  Google Scholar 

  30. W.E. Tenhaeff, K.K. Gleason, Adv. Funct. Mater. 18, 979 (2008)

    Article  CAS  Google Scholar 

  31. T. Martin, S. Kooi, S. Chang, K. Sedransk, K. Gleason, Biomaterials 28, 909 (2007)

    Article  CAS  PubMed  Google Scholar 

  32. M.J. Kim, J. Jeong, T.I. Lee, J. Kim, Y. Tak, H. Park, S.G. Im, B.J. Cho, Macromol. Mater. Eng. 306, 2000608 (2021)

    Article  CAS  Google Scholar 

  33. K. Jeong, Y. Lee, Y. Kim, H. Mun, K.-U. Kyung, S.G. Im, Chem. Eng. J. 429, 132250 (2022)

    Article  CAS  Google Scholar 

  34. M.S. Oh, M. Jeon, K. Jeong, J. Ryu, S.G. Im, Chem. Mater. 33, 1314 (2021)

    Article  CAS  Google Scholar 

  35. W.S. O’Shaughnessy, M. Gao, K.K. Gleason, Langmuir 22, 7021 (2006)

    Article  CAS  PubMed  Google Scholar 

  36. R. Cross, M.M. De Souza, S.C. Deane, N.D. Young, IEEE Trans. Electron Dev. 55, 1109 (2008)

    Article  CAS  Google Scholar 

  37. G.D. Wilk, R.M. Wallace, J. Anthony, J. Appl. Phys. 89, 5243 (2001)

    Article  CAS  Google Scholar 

  38. R. Hill, Thin Solid Films 1, 39 (1967)

    Article  CAS  Google Scholar 

  39. W. Wang, T. Lee, M.A. Reed, Phys. Rev. B 68, 035416 (2003)

    Article  Google Scholar 

  40. J.L. Yagüe, A.M. Coclite, C. Petruczok, K.K. Gleason, Macromol. Chem. Phys. 214, 302 (2013)

    Article  Google Scholar 

  41. J.-H. Seok, S.H. Kim, S.M. Cho, G.-R. Yi, J.Y. Lee, Macromol. Res. 26, 1257 (2018)

    Article  CAS  Google Scholar 

  42. Y. Ye, Y. Mao, F. Wang, H. Lu, L. Qu, L. Dai, J. Mater. Chem. 21, 837 (2011)

    Article  CAS  Google Scholar 

  43. M.J. Kim, K. Pak, W.S. Hwang, S.G. Im, B.J. Cho, A.C.S. Appl, Mater. Interfaces 10, 37326 (2018)

    Article  CAS  Google Scholar 

  44. S.H. Chae, W.J. Yu, J.J. Bae, D.L. Duong, D. Perello, H.Y. Jeong, Q.H. Ta, T.H. Ly, Q.A. Vu, M. Yun, Nat. Mater. 12, 403 (2013)

    Article  CAS  PubMed  Google Scholar 

  45. A.A. Virkar, S. Mannsfeld, Z. Bao, N. Stingelin, Adv. Mater. 22, 3857 (2010)

    Article  CAS  PubMed  Google Scholar 

  46. A. Virkar, S. Mannsfeld, J.H. Oh, M.F. Toney, Y.H. Tan, Gy. Liu, J.C. Scott, R. Miller, Z. Bao, Adv. Funct. Mater. 19, 1962 (2009)

    Article  CAS  Google Scholar 

  47. R. Gonzalez, B.M. Gordon, M.A. Horowitz, IEEE J. Solid-State Circuits 32, 1210 (1997)

    Article  Google Scholar 

  48. K. Hizu, T. Sekitani, T. Someya, J. Otsuki, Appl. Phys. Lett. 90, 093504 (2007)

  49. J.B. Koo, C.H. Ku, J.W. Lim, S.H. Kim, Org. Electron. 8, 552 (2007)

    Article  CAS  Google Scholar 

  50. Y. Choi, I.-D. Kim, H.L. Tuller, A.I. Akinwande, IEEE Trans. Electron Dev. 52, 2819 (2005)

    Article  CAS  Google Scholar 

  51. Y. Fujisaki, H. Sato, T. Yamamoto, H. Fujikake, S. Tokito, T. Kurita, J. Soc. Inf. Disp. 15, 501 (2007)

    Article  CAS  Google Scholar 

  52. Y. Takeda, K. Hayasaka, R. Shiwaku, K. Yokosawa, T. Shiba, M. Mamada, D. Kumaki, K. Fukuda, S. Tokito, Sci. Rep. 6, 25714 (2016)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  53. A. Facchetti, M.H. Yoon, T.J. Marks, Adv. Mater. 17, 1705 (2005)

    Article  CAS  Google Scholar 

  54. H. Chen, X. Xing, J. Miao, C. Zhao, M. Zhu, J. Bai, Y. He, H. Meng, Adv. Opt. Mater. 8, 1901651 (2020)

    Article  CAS  Google Scholar 

  55. R. Matsuno, Y. Takagaki, T. Ito, H. Yoshikawa, S. Takamatsu, A. Takahara, Macromolecules 53, 10128 (2020)

    Article  CAS  Google Scholar 

  56. X. Huang, Z. Zhou, G.-X. Chen, Q. Li, Chem. Phys. Lett. 711, 173 (2018)

    Article  CAS  Google Scholar 

  57. S. Zhang, Z. Zhang, J. Liu, L. Wang, Adv. Funct. Mater. 26, 6107 (2016)

    Article  CAS  Google Scholar 

  58. M. Inutsuka, K. Inoue, Y. Hayashi, A. Inomata, Y. Sakai, H. Yokoyama, K. Ito, Polymer 59, 10 (2015)

    Article  CAS  Google Scholar 

  59. G. Lopinski, N. Du, G. Dubey, J. Lefebvre, Z. Li, S. Zou, P. Malenfant, Org. Electron. 42, 329 (2017)

    Article  CAS  Google Scholar 

  60. M. Misra, M. Agarwal, D.W. Sinkovits, S.K. Kumar, C. Wang, G. Pilania, R. Ramprasad, R.A. Weiss, X. Yuan, T.M. Chung, Macromolecules 47, 1122 (2014)

    Article  CAS  Google Scholar 

  61. T.D. Tsai, J.W. Chang, T.C. Wen, T.F. Guo, Adv. Funct. Mater. 23, 4206 (2013)

    Article  CAS  Google Scholar 

  62. S. Lee, B. Koo, J. Shin, E. Lee, H. Park, H. Kim, Appl. Phys. Lett., 88 (2006).

  63. H.H. Choi, W.H. Lee, K. Cho, Adv. Funct. Mater. 22, 4833 (2012)

    Article  CAS  Google Scholar 

  64. C.G. Choi, B.-S. Bae, Electrochem. Solid-State Lett. 10, H347 (2007)

    Article  CAS  Google Scholar 

  65. S. Wang, J. Xu, W. Wang, G.-J.N. Wang, R. Rastak, F. Molina-Lopez, J.W. Chung, S. Niu, V.R. Feig, J. Lopez, Nature 555, 83 (2018)

    Article  CAS  PubMed  Google Scholar 

  66. J. Xu, S. Wang, G.-J.N. Wang, C. Zhu, S. Luo, L. Jin, X. Gu, S. Chen, V.R. Feig, J.W. To, Science 355, 59 (2017)

    Article  CAS  PubMed  Google Scholar 

  67. A. Chortos, G.I. Koleilat, R. Pfattner, D. Kong, P. Lin, R. Nur, T. Lei, H. Wang, N. Liu, Y.-C. Lai, Adv. Mater. 28, 4441 (2015)

    Article  PubMed  Google Scholar 

  68. L. Cai, S. Zhang, J. Miao, Z. Yu, C. Wang, ACS Nano 10, 11459 (2016)

    Article  CAS  PubMed  Google Scholar 

  69. H.-J. Kim, K. Sim, A. Thukral, C. Yu, Sci. Adv. 3, e1701114 (2017)

    Article  PubMed  PubMed Central  Google Scholar 

  70. J. Liang, L. Li, D. Chen, T. Hajagos, Z. Ren, S.-Y. Chou, W. Hu, Q. Pei, Nat. Commun. 6, 7647 (2015)

    Article  CAS  PubMed  Google Scholar 

  71. B. Zhang, J. Lei, D. Qi, Z. Liu, Y. Wang, G. Xiao, J. Wu, W. Zhang, F. Huo, X. Chen, Adv. Funct. Mater. 28, 1801683 (2018)

    Article  Google Scholar 

  72. J. Kim, M. Lee, H.J. Shim, R. Ghaffari, H.R. Cho, D. Son, Y.H. Jung, M. Soh, C. Choi, S. Jung, K. Chu, D. Jeon, S.T. Lee, J.H. Kim, S.H. Choi, T. Hyeon, D.H. Kim, Nat. Commun. 5, 5747 (2014)

    Article  CAS  PubMed  Google Scholar 

  73. D.-H. Kim, N. Lu, R. Ma, Y.-S. Kim, R.-H. Kim, S. Wang, J. Wu, S.M. Won, H. Tao, A. Islam, Science 333, 838 (2011)

    Article  CAS  PubMed  Google Scholar 

  74. C. Wang, X. Li, H. Hu, L. Zhang, Z. Huang, M. Lin, Z. Zhang, Z. Yin, B. Huang, H. Gong, Nat. Biomed. Eng. 2, 687 (2018)

    Article  PubMed  PubMed Central  Google Scholar 

  75. N. Matsuhisa, M. Kaltenbrunner, T. Yokota, H. Jinno, K. Kuribara, T. Sekitani, T. Someya, Nat. Commun. 6, 7461 (2015)

    Article  CAS  PubMed  Google Scholar 

  76. Z. Huang, Y. Hao, Y. Li, H. Hu, C. Wang, A. Nomoto, T. Pan, Y. Gu, Y. Chen, T. Zhang, Nat. Electron. 1, 473 (2018)

    Article  Google Scholar 

  77. W. Gao, S. Emaminejad, H.Y.Y. Nyein, S. Challa, K. Chen, A. Peck, H.M. Fahad, H. Ota, H. Shiraki, D. Kiriya, Nature 529, 509 (2016)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  78. K. Sim, Z. Rao, Z. Zou, F. Ershad, J. Lei, A. Thukral, J. Chen, Q.-A. Huang, J. Xiao, C. Yu, Sci. Adv. 5, eaav9653 (2019)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  79. D. Son, J. Lee, S. Qiao, R. Ghaffari, J. Kim, J.E. Lee, C. Song, S.J. Kim, D.J. Lee, S.W. Jun, Nat. Nanotechnol. 9, 397 (2014)

    Article  CAS  PubMed  Google Scholar 

  80. D.-H. Kim, J.-H. Ahn, W.M. Choi, H.-S. Kim, T.-H. Kim, J. Song, Y.Y. Huang, Z. Liu, C. Lu, J.A. Rogers, Science 320, 507 (2008)

    Article  CAS  PubMed  Google Scholar 

  81. J.-Y. Yoo, S. Oh, W. Shalish, W.-Y. Maeng, E. Cerier, E. Jeanne, M.-K. Chung, S. Lv, Y. Wu, S. Yoo, Nat. Med. 29, 3137 (2023)

    Article  CAS  PubMed  Google Scholar 

  82. Q. Yang, T.-L. Liu, Y. Xue, H. Wang, Y. Xu, B. Emon, M. Wu, C. Rountree, T. Wei, I. Kandela, Nat. Electron. 5, 526 (2022)

    Article  CAS  Google Scholar 

  83. J. Liang, L. Li, X. Niu, Z. Yu, Q. Pei, Nat. Photon. 7, 817 (2013)

    Article  CAS  Google Scholar 

  84. Y. Lee, J.W. Chung, G.H. Lee, H. Kang, J.-Y. Kim, C. Bae, H. Yoo, S. Jeong, H. Cho, S.-G. Kang, Sci. Adv. 7, 1eabg9180 (2021)

    Google Scholar 

  85. J.Y. Oh, S. Rondeau-Gagne, Y.C. Chiu, A. Chortos, F. Lissel, G.N. Wang, B.C. Schroeder, T. Kurosawa, J. Lopez, T. Katsumata, J. Xu, C. Zhu, X. Gu, W.G. Bae, Y. Kim, L. Jin, J.W. Chung, J.B. Tok, Z. Bao, Nature 539, 411 (2016)

    Article  CAS  PubMed  Google Scholar 

  86. D. Zhong, C. Wu, Y. Jiang, Y. Yuan, M.-G. Kim, Y. Nishio, C.-C. Shih, W. Wang, J.-C. Lai, X. Ji, Nature 627, 313 (2024)

    Article  CAS  PubMed  Google Scholar 

  87. W. Wang, Y. Jiang, D. Zhong, Z. Zhang, S. Choudhury, J.-C. Lai, H. Gong, S. Niu, X. Yan, Y. Zheng, Science 380, 735 (2023)

    Article  CAS  PubMed  Google Scholar 

  88. W. Wang, S. Wang, R. Rastak, Y. Ochiai, S. Niu, Y. Jiang, P.K. Arunachala, Y. Zheng, J. Xu, N. Matsuhisa, Nat. Electron. 4, 143 (2021)

    Article  CAS  Google Scholar 

  89. Y. Yang, W. Lu, Nanoscale 5, 10076 (2013)

    Article  CAS  PubMed  Google Scholar 

  90. B. Cho, S. Song, Y. Ji, T.W. Kim, T. Lee, Adv. Funct. Mater. 21, 2806 (2011)

    Article  CAS  Google Scholar 

  91. O. Russakovsky, J. Deng, H. Su, J. Krause, S. Satheesh, S. Ma, Z. Huang, A. Karpathy, A. Khosla, M. Bernstein, Int. J. Comput. Vis. 115, 211 (2015)

    Article  Google Scholar 

  92. P. Yao, H. Wu, B. Gao, S.B. Eryilmaz, X. Huang, W. Zhang, Q. Zhang, N. Deng, L. Shi, H.P. Wong, H. Qian, Nat. Commun. 8, 15199 (2017)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  93. S. Swayamsiddha, C. Mohanty, Diabetes Metab. Syndr. 14, 911 (2020)

    Article  PubMed  PubMed Central  Google Scholar 

  94. D. Kuzum, S. Yu, H.S. Wong, Nanotechnology 24, 382001 (2013)

    Article  PubMed  Google Scholar 

  95. B. Mu, H.-H. Hsu, C.-C. Kuo, S.-T. Han, Y. Zhou, J. Mater. Chem. C 8, 12714 (2020)

    Article  CAS  Google Scholar 

  96. J.H. Lee, S.P. Park, K. Park, H.J. Kim, Adv. Funct. Mater. 30, 1907437 (2020)

    Article  CAS  Google Scholar 

  97. Q. Shi, J. Wang, I. Aziz, P.S. Lee, Adv. Intell. Syst. 2, 2000007 (2020)

    Article  Google Scholar 

  98. J.-Y. Mao, L. Zhou, Y. Ren, J.-Q. Yang, C.-L. Chang, H.-C. Lin, H.-H. Chou, S.-R. Zhang, Y. Zhou, S.-T. Han, J. Mater. Chem. C 7, 1491 (2019)

    Article  CAS  Google Scholar 

  99. Y. Cai, J. Tan, L. YeFan, M. Lin, R. Huang, Nanotechnology 27, 275206 (2016)

    Article  PubMed  Google Scholar 

  100. M.K. Rahmani, S.A. Khan, M.F. Khan, M.H. Kang, Mater. Sci. Eng. B 282, 115784 (2022)

    Article  Google Scholar 

  101. B.-H. Lee, H. Bae, H. Seong, D.-I. Lee, H. Park, Y.J. Choi, S.-G. Im, S.O. Kim, Y.-K. Choi, ACS Nano 9, 7306 (2015)

    Article  CAS  PubMed  Google Scholar 

  102. M. Uenuma, Y. Ishikawa, Y. Uraoka, Appl. Phys. Lett. 107, 073503 (2015)

  103. W.P. Lin, S.J. Liu, T. Gong, Q. Zhao, W. Huang, Adv. Mater. 26, 570 (2014)

    Article  CAS  PubMed  Google Scholar 

  104. H.E. Lee, J.H. Park, T.J. Kim, D. Im, J.H. Shin, D.H. Kim, B. Mohammad, I.S. Kang, K.J. Lee, Adv. Funct. Mater. 28, 1801690 (2018)

    Article  Google Scholar 

  105. M.T. Ghoneim, M.M. Hussain, Electronics 4, 424 (2015)

    Article  CAS  Google Scholar 

  106. B.C. Jang, S. Kim, S.Y. Yang, J. Park, J.H. Cha, J. Oh, J. Choi, S.G. Im, V.P. Dravid, S.Y. Choi, Nano Lett. 19, 839 (2019)

    Article  CAS  PubMed  Google Scholar 

  107. Y. Gao, S.F. Al-Sarawi, D. Abbott, Nat. Electron. 3, 81 (2020)

    Article  Google Scholar 

  108. K. Kuribara, Y. Hori, T. Katashita, K. Kakita, Y. Tanaka, M. Yoshida, Org. Electron. 51, 137 (2017)

    Article  CAS  Google Scholar 

  109. B. Halak, M. Zwolinski, M.S. Mispan, In 2016 IEEE 59th International Midwest Symposium on Circuits and Systems (MWSCAS), 1–4 (2016)

  110. T. Idriss, H. Idriss, M. Bayoumi, In 2016 IEEE 3rd World Forum on Internet of Things (WF-IoT), 700–705 (2016)

  111. A. Sebastian, M. Le Gallo, R. Khaddam-Aljameh, E. Eleftheriou, Nat. Nanotechnol. 15, 529 (2020)

    Article  CAS  PubMed  Google Scholar 

  112. J. Oh, S. Kim, J. Choi, J.-H. Cha, S.G. Im, B.C. Jang, S.-Y. Choi, Adv. Intell. Syst. 4, 2200177 (2022)

    Article  Google Scholar 

  113. S.T. Han, Y. Zhou, V.A. Roy, Adv. Mater. 25, 5425 (2013)

    Article  CAS  PubMed  Google Scholar 

  114. S.S. Kim, S.K. Yong, W. Kim, S. Kang, H.W. Park, K.J. Yoon, D.S. Sheen, S. Lee, C.S. Hwang, Adv. Mater. 35, e2200659 (2023)

    Article  PubMed  Google Scholar 

  115. R. Bez, E. Camerlenghi, A. Modelli, A. Visconti, Proc. IEEE 91, 489 (2003)

    Article  Google Scholar 

  116. M. Kang, Y.-A. Kim, J.-M. Yun, D. Khim, J. Kim, Y.-Y. Noh, K.-J. Baeg, D.-Y. Kim, Nanoscale 6, 12315 (2014)

    Article  CAS  PubMed  Google Scholar 

  117. M. Kang, D. Khim, W.-T. Park, J. Kim, J. Kim, Y.-Y. Noh, K.-J. Baeg, D.-Y. Kim, Sci. Rep. 5, 12299 (2015)

    Article  PubMed  PubMed Central  Google Scholar 

  118. M. Kang, K.J. Baeg, D. Khim, Y.Y. Noh, D.Y. Kim, Adv. Funct. Mater. 23, 3503 (2013)

    Article  CAS  Google Scholar 

  119. M.H. Woo, B.C. Jang, J. Choi, K.J. Lee, G.H. Shin, H. Seong, S.G. Im, S.Y. Choi, Adv. Funct. Mater. 27, 1703545 (2017)

    Article  Google Scholar 

  120. B.-L. Yang, P. Lai, H. Wong, Microelectron. Reliab. 44, 709 (2004)

    Article  Google Scholar 

  121. C.-Y. Lu, K.-Y. Hsieh, R. Liu, Microelectron. Eng. 86, 283 (2009)

    Article  CAS  Google Scholar 

  122. T. Kitamura, M. Kawata, I. Honma, I. Yamamoto, S. Nishimoto, K.-i. Oyama, In 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No. 98CH36216), 104–105 (1998)

  123. M. Alessandri, R. Piagge, S. Alberici, E. Bellandi, M. Caniatti, G. Ghidini, A. Modelli, G. Pavia, E. Ravizza, A. Sebastiani, ECS Trans. 1, 91 (2006)

    Article  CAS  Google Scholar 

  124. C. Zhao, C.Z. Zhao, S. Taylor, P.R. Chalker, Materials 7, 5117 (2014)

    Article  PubMed  PubMed Central  Google Scholar 

  125. E. Zhang, W. Wang, C. Zhang, Y. Jin, G. Zhu, Q. Sun, D.W. Zhang, P. Zhou, F. Xiu, ACS Nano 9, 612 (2015)

    Article  CAS  PubMed  Google Scholar 

  126. P. Dimitrakis, Springer (2017).

  127. C.-Y. Lu, J. Nanosci. Nanotechnol. 12, 7604 (2012)

    Article  CAS  PubMed  Google Scholar 

  128. O. Bae, F.S. Kim, Macromol. Res. 28, 677 (2020)

    Article  CAS  Google Scholar 

  129. S.J. Lee, K.G. Cho, S.-H. Jung, S. Kim, J.-K. Lee, K.H. Lee, Macromol. Res. 28, 683 (2020)

    Article  CAS  Google Scholar 

  130. U. Zschieschang, U. Waizmann, J. Weis, J.W. Borchert, H. Klauk, Sci. Adv. 8, eabm9845 (2022)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  131. P. Li, J. Shi, Y. Lei, Z. Huang, T. Lei, Nat. Commun. 13, 5970 (2022)

    Article  PubMed  PubMed Central  Google Scholar 

  132. Y. Zhang, Y. Wang, C. Gao, Z. Ni, X. Zhang, W. Hu, H. Dong, Chem. Soc. Rev. 52, 1331 (2023)

    Article  CAS  PubMed  Google Scholar 

  133. J. Chen, W. Zhang, L. Wang, G. Yu, Adv. Mater. 35, 2210772 (2023)

    Article  CAS  Google Scholar 

  134. M. Nikolka, K. Broch, J. Armitage, D. Hanifi, P.J. Nowack, D. Venkateshvaran, A. Sadhanala, J. Saska, M. Mascal, S.H. Jung, J.K. Lee, I. McCulloch, A. Salleo, H. Sirringhaus, Nat. Commun. 10, 2122 (2019)

    Article  PubMed  PubMed Central  Google Scholar 

  135. I. Salzmann, G. Heimel, M. Oehzelt, S. Winkler, N. Koch, Acc. Chem. Res. 49, 370 (2016)

    Article  CAS  PubMed  Google Scholar 

  136. N. Stingelin, O.D. Jurchescu, Y. Wakayama, E. Orgiu, Adv. Mater. Interfaces 10, 2300524 (2023)

  137. T. Okamoto, C.P. Yu, C. Mitsui, M. Yamagishi, H. Ishii, J. Takeya, J. Am. Chem. Soc. 142, 9083 (2020)

    Article  CAS  PubMed  Google Scholar 

  138. Q. Liu, S.E. Bottle, P. Sonar, Adv. Mater. 32, 1903882 (2020)

    Article  CAS  Google Scholar 

  139. A.D. Scaccabarozzi, A. Basu, F. Aniés, J. Liu, O. Zapata-Arteaga, R. Warren, Y. Firdaus, M.I. Nugraha, Y. Lin, M. Campoy-Quiles, Chem. Rev. 122, 4420 (2021)

    Article  PubMed  Google Scholar 

  140. C. Newby, J.-K. Lee, C.K. Ober, Macromol. Res. 21, 248 (2013)

    Article  CAS  Google Scholar 

  141. S. Griggs, A. Marks, H. Bristow, I. McCulloch, J. Mater. Chem. C 9, 8099 (2021)

    Article  CAS  Google Scholar 

  142. E.K. Lee, M.Y. Lee, C.H. Park, H.R. Lee, J.H. Oh, Adv. Mater. 29, 1703638 (2017)

    Article  Google Scholar 

  143. A. Kim, K.S. Jang, J. Kim, J.C. Won, M.H. Yi, H. Kim, D.K. Yoon, T.J. Shin, M.H. Lee, J.W. Ka, Adv. Mater. 25, 6219 (2013)

    Article  CAS  PubMed  Google Scholar 

  144. H. Yoo, M. Ghittorelli, D.-K. Lee, E.C. Smits, G.H. Gelinck, H. Ahn, H.-K. Lee, F. Torricelli, J.-J. Kim, Sci. Rep. 7, 5015 (2017)

    Article  PubMed  PubMed Central  Google Scholar 

  145. J.-H. Bae, J. Park, C.-M. Keum, W.-H. Kim, M.-H. Kim, S.-O. Kim, S.K. Kwon, S.-D. Lee, Org. Electron. 11, 784 (2010)

    Article  CAS  Google Scholar 

  146. K.K. Lau, K.K. Gleason, Macromolecules 39, 3688 (2006)

    Article  CAS  Google Scholar 

  147. K.K. Lau, K.K. Gleason, Macromolecules 39, 3695 (2006)

    Article  CAS  Google Scholar 

  148. M. Wang, X. Wang, P. Moni, A. Liu, D.H. Kim, W.J. Jo, H. Sojoudi, K.K. Gleason, Adv. Mater. 29, 1604606 (2017)

  149. H. Park, H. Yoo, C. Lee, J.-J. Kim, S.G. Im, IEEE Electron Device Lett. 41, 1685 (2020)

    Article  CAS  Google Scholar 

  150. J. Kim, C. Fuentes-Hernandez, D. Hwang, W. Potscavage Jr., H. Cheun, B. Kippelen, Org. Electron. 12, 45 (2011)

    Article  CAS  Google Scholar 

  151. K. Nomura, T. Aoki, K. Nakamura, T. Kamiya, T. Nakanishi, T. Hasegawa, M. Kimura, T. Kawase, M. Hirano, H. Hosono, Appl. Phys. Lett. 96, 263509 (2010)

  152. J. Kwon, S. Kyung, S. Yoon, J.J. Kim, S. Jung, Adv. Sci. 3, 1500439 (2016)

    Article  Google Scholar 

  153. J. Kwon, Y. Takeda, K. Fukuda, K. Cho, S. Tokito, S. Jung, ACS Nano 10, 10324 (2016)

    Article  CAS  PubMed  Google Scholar 

  154. Y. Zhao, Q. Li, X. Xiao, G. Li, Y. Jin, K. Jiang, J. Wang, S. Fan, ACS Nano 10, 2193 (2016)

    Article  CAS  PubMed  Google Scholar 

  155. C. Lee, C. Lee, S. Lee, J. Choi, H. Yoo, S.G. Im, Nat. Commun. 14, 3757 (2023)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  156. Y. Lee, S. Kim, H.I. Lee, S.M. Kim, S.Y. Kim, K. Kim, H. Kwon, H.W. Lee, H.J. Hwang, S. Kang, B.H. Lee, ACS Nano 16, 10994 (2022)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  157. C. Lee, J. Choi, H. Park, C. Lee, C.H. Kim, H. Yoo, S.G. Im, Small 17, e2103365 (2021)

    Article  PubMed  Google Scholar 

  158. M. Andreev, S. Seo, K.S. Jung, J.H. Park, Adv. Mater. 34, 2108830 (2022)

    Article  CAS�� Google Scholar 

  159. H. Yoo, C.-H. Kim, J. Mater. Chem. C 9, 4092 (2021)

    Article  CAS  Google Scholar 

  160. K. Kobashi, R. Hayakawa, T. Chikyow, Y. Wakayama, Nano Lett. 18, 4355 (2018)

    Article  CAS  PubMed  Google Scholar 

  161. C.H. Kim, H. Yoo, Adv. Electron. Mater. 7, 2100167 (2021)

    Article  CAS  Google Scholar 

  162. H. Yoo, S. On, S.B. Lee, K. Cho, J.J. Kim, Adv. Mater. 31, e1808265 (2019)

    Article  PubMed  Google Scholar 

  163. J. Choi, C. Lee, C. Lee, H. Park, S.M. Lee, C.H. Kim, H. Yoo, S.G. Im, Nat. Commun. 13, 2305 (2022)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  164. A. Kendall, Y. Gal, Adv. Neural Inf. Process. Syst. 30, 5574–5584 (2017)

  165. C. Guo, G. Pleiss, Y. Sun, K. Q. Weinberger, PMLR, 1321–1330 (2017)

  166. U. Von Toussaint, Rev. Mod. Phys. 83, 943 (2011)

    Article  Google Scholar 

  167. M. Shi, A. Bermak, S. Chandrasekaran, A. Amira, Proc. In 2006 13th International Conference on Electronics, Circuits and Systems), 1276–1279 (2006)

  168. D. Vrtaric, V. Ceperic, A. Baric, Neurocomputing 118, 329 (2013)

    Article  Google Scholar 

  169. C. Lee, L. Rahimifard, J. Choi, J.I. Park, C. Lee, D. Kumar, P. Shukla, S.M. Lee, A.R. Trivedi, H. Yoo, S.G. Im, Nat. Commun. 15, 2439 (2024)

    Article  CAS  PubMed  PubMed Central  Google Scholar 

Download references

Acknowledgements

Sukwon Jang, Youson Kim, and Chungryeol Lee contributed equally to this work. This work was supported by the Technology Innovation Program (1415181712, RS-2022-00144300) funded By the Ministry of Trade, Industry & Energy (MOTIE, Korea). This work was also supported by the Wearable Platform Materials Technology Center (WMC) funded by the National Research Foundation of Korea (NRF) Grant by the Korean Government (MSIT) (NRF-2022R1A5A6000846). This work was also supported by the Technology development Program (S3207541) funded by the Ministry of SMEs and Startups (MSS, Korea). This work was also supported by Samsung Advanced Institute of Technology (SAIT), SEC. This work was also supported by Samsung Display Co.,Ltd. This work was also supported by Nanomedical Devices Development Project of NNFC 2024.

Author information

Author notes

  1. Sukwon Jang, Youson Kim, Chungryeol Lee have contributed equally to this work.

Authors and Affiliations

  1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Korea

    Sukwon Jang, Youson Kim, Chungryeol Lee, Taehyun Nam, Jeongik Park, Junyeong Yang, Juchan Kim, Bohyun Lee & Sung Gap Im

  2. KAIST Institute for NanoCentury (KINC), Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Korea

    Sung Gap Im

Authors
  1. Sukwon Jang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Youson Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Chungryeol Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Taehyun Nam
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jeongik Park
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Junyeong Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Juchan Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Bohyun Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Sung Gap Im
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Sung Gap Im.

Ethics declarations

Conflict of Interest

The authors declare no competing financial interest.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Jang, S., Kim, Y., Lee, C. et al. Vapor-Phase Deposited Polymer Dielectric Layers for Organic Electronics: Design, Characteristics, and Applications. Korean J. Chem. Eng. (2024). https://doi.org/10.1007/s11814-024-00210-5

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11814-024-00210-5

Keywords

Search

Navigation