My issue is my meter's measurement accuracy is only around 10uA,
Maybe on your lowest current range perhaps. Have you looked carefully at what your lowest voltage range will do?
I have a cheapo 3.5 digit DMM, but it has a 200 mV range, with a 10 MΩ input resistance. That's a full scale of 200m/10M = 20 nA, with a resolution of 10 pA.
I have a meter that's only slightly more expensive, where the equivalent lowest voltage range is a very high input impedance, presumably a CMOS buffer with lower leakage current than I can be bothered to measure properly. I often use it with a 100 MΩ external shunt resistor for 1 pA resolution.
The ultimate way to measure a low current without resorting to buying fA amplifiers is to measure the change of voltage across a high quality capacitor, so ideally PTFE or polystyrene dielectric, though any type of plastic film will usually give good results. Choose one large enough that you can read its voltage stably within the few seconds it takes a DMM to settle, but small enough that the leakage current will change its voltage in a reasonable time, you don't really want to wait hours. Measure the capacitor voltage, disconnect the meter and connect the unknown leakage current, wait a number of minutes, then remeasure the voltage. Leakage current = dQ/dt = CdV/dt.
Of course any attempt to measure sub pA will be beset by surface leakage currents (fingerprint contamination) and changes in charge distribution around the measuring setup (just moving while wearing synthetic clothing).
accurate
but say nothing about the applied voltages. Even if you got a diode leakage measurement of 4 nA, for example, does it matter to you if that was with a reverse voltage of 1 V or 10 V? Also, accuracy is something that needs to be calibrated and traceable to standards. Precision is a different thing. And just 1 V between two pins of a very very clean epoxy package can yield 1 pA, dead-bug and not soldered into a board. It all gets worse from there. Consider your construction and cleaning carefully. And why do you need calibrated accuracy? \$\endgroup\$