One of the advantages of kinetic inductance detectors is their intrinsic frequency domain multiplexing capability. However, fabrication imperfections usually give rise to resonance frequency deviations, which create frequency collision and limit the array yield. Here, we study the resonance frequency deviation of a 4-in. kilo-pixel lumped-element kinetic inductance detector (LEKID) array using optical mapping. Using the measured resonator dimensions and film thickness, the fractional deviation can be explained within , whereas the residual deviation is due to variation of electric film properties. Using the capacitor trimming technique, the fractional deviation is decreased by a factor of 14. The yield of the trimming process is found to be 97%. The mapping yield, measured under a 110 K background, is improved from 69% to 76%, which can be further improved to 81% after updating our readout system. With the improvement in yield, the capacitor trimming technique may benefit future large-format LEKID arrays.
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Understanding and minimizing resonance frequency deviations on a 4-in. kilo-pixel kinetic inductance detector array
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30 August 2021
Research Article|
August 30 2021
Understanding and minimizing resonance frequency deviations on a 4-in. kilo-pixel kinetic inductance detector array
S. Shu
;
S. Shu
a)
1
Institut de RadioAstronomie Millimétrique
, 38406 Saint Martin d'Hères, France
a)Present address: California Institute of Technology, Pasadena, California 91125, USA. Author to whom correspondence should be addressed: shiboshu@caltech.edu
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M. Calvo;
M. Calvo
2
Institut Néel, CNRS and Université Grenoble Alpes
, 38042 Grenoble, France
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J. Goupy;
J. Goupy
1
Institut de RadioAstronomie Millimétrique
, 38406 Saint Martin d'Hères, France
2
Institut Néel, CNRS and Université Grenoble Alpes
, 38042 Grenoble, France
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S. Leclercq;
S. Leclercq
1
Institut de RadioAstronomie Millimétrique
, 38406 Saint Martin d'Hères, France
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A. Catalano
;
A. Catalano
2
Institut Néel, CNRS and Université Grenoble Alpes
, 38042 Grenoble, France
3
LPSC, CNRS and Université Grenoble Alpes
, 38026 Grenoble, France
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A. Bideaud;
A. Bideaud
2
Institut Néel, CNRS and Université Grenoble Alpes
, 38042 Grenoble, France
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A. Monfardini
;
A. Monfardini
2
Institut Néel, CNRS and Université Grenoble Alpes
, 38042 Grenoble, France
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E. F. C. Driessen
E. F. C. Driessen
1
Institut de RadioAstronomie Millimétrique
, 38406 Saint Martin d'Hères, France
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a)Present address: California Institute of Technology, Pasadena, California 91125, USA. Author to whom correspondence should be addressed: shiboshu@caltech.edu
Appl. Phys. Lett. 119, 092601 (2021)
Article history
Received:
May 28 2021
Accepted:
August 18 2021
Citation
S. Shu, M. Calvo, J. Goupy, S. Leclercq, A. Catalano, A. Bideaud, A. Monfardini, E. F. C. Driessen; Understanding and minimizing resonance frequency deviations on a 4-in. kilo-pixel kinetic inductance detector array. Appl. Phys. Lett. 30 August 2021; 119 (9): 092601. https://doi.org/10.1063/5.0058335
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