PiezoMEMS devices require thin films of piezoelectric materials to achieve optimal performance. This is where Pulsus™ comes in—our pulsed laser deposition (PLD) system enables the deposition of high-quality scandium aluminum nitride (ScAlN) films for improved performance of piezoMEMS applications. Read more about our breakthrough technology. https://bit.ly/3xsB2Da
Tanner Bean
1w
What laser technology does Pulsus use? Will the height of the 300mm Pulsus PM upper chamber need to be ~50% taller? (To enable uniform PLD on 300mm instead of 200mm) Is PM4 missing a PM door? 🤔
Impressive
”Open to Work” with expertise in EUV Source |Optical R&D |Defect AOI |E-beam PE/EE |ALD PE/EE
1wAdditional points to consider: * PLD might require more specialized equipment and expertise compared to other deposition techniques. * Ongoing research is optimizing PLD parameters for ScAlN deposition to achieve the best possible film characteristics. #LamResearch