“I worked with Jay while at Knowles electronics. He is a highly competent and methodical process development engineer. His rigorous attention to detail and extensive knowledge of MEMS, analysis, and design of experiments make him a valuable asset to Knowles. Over the time I worked with Jay, I learned a lot from him on many technical subjects and found him to be a person of the highest integrity, thus highly recommend him to anyone who might seek to work with him.”
Contributions
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How do you reduce the stress and deformation of MEMS structures during fabrication?
Most deformations are caused by deposited film stress, and changes in that film stress during thermal process steps later in the flow. Careful optimization of stress by control of the deposition parameters (gas ratios, temperature, pressure ) for CVD and sputtering processes, as well as controlling the process sequence, meaning the sequence of high temperature steps, and their temperature/time can minimize residual stress in fabricated structures.
Activity
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We are excited to host our next Connection Series at Plasmatreat! 🌐 We recently visited their headquarter facilities in Elgin, IL, and got to learn…
We are excited to host our next Connection Series at Plasmatreat! 🌐 We recently visited their headquarter facilities in Elgin, IL, and got to learn…
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imec's High-NA EUV work for Logic & DRAM. 1. 9.5nm random logic structure (19 nm pitch) after pattern transfer. 2. Vias with a 30 nm…
imec's High-NA EUV work for Logic & DRAM. 1. 9.5nm random logic structure (19 nm pitch) after pattern transfer. 2. Vias with a 30 nm…
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Languages
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Basic German
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Recommendations received
1 person has recommended Jay
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