Faisal Zaman

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Publications

Patents

  • Mems apparatus with intentional geometrical imperfections for alignment of resonant modes and to compensate for manufacturing variations

    Issued US WO2015108989

    A resonant gyroscope apparatus is implemented with an annulus shaped resonant member in which geometric imperfections, in form of non-uniform exterior and interior profiles, are introduced into the shape of the resonant member during the manufacturing process so that the shape of the resonant member causes vibratory nodes and anti-nodes to align to an intended direction during resonant modes of operation.

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  • Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope

    Issued US US8677821

    Disclosed are methods and a sensor architecture that utilizes the residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching, i.e., 0 Hz split between the drive and sense mode frequencies, and to electronically control sensor bandwidth.

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  • Resonating star gyroscope

    Issued US US7360423

    Disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto. The angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell-type structure for rate sensing or measuring angle of rotation. The structure formed as a merged superposition of two square entities, yields in-plane degenerate flexural modes that are used to sense rotation around the axis perpendicular to the substrate.

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  • High-resolution in-plane tuning fork gyroscope and methods of fabrication

    Issued US US7043985

    A microstructure comprising an in-plane solid-mass electrically conductive tuning fork gyroscope and fabrication methods. Two opposed proof masses that are separated from the lower support layer lie in and are supported by the upper flexible support layer. The operational mode shapes are in-plane with the substrate surface and only measures angular motion that are orthogonal to the plane of the substrate. The microstructure flexural design enables the sense and the drive resonant frequencies to…

    A microstructure comprising an in-plane solid-mass electrically conductive tuning fork gyroscope and fabrication methods. Two opposed proof masses that are separated from the lower support layer lie in and are supported by the upper flexible support layer. The operational mode shapes are in-plane with the substrate surface and only measures angular motion that are orthogonal to the plane of the substrate. The microstructure flexural design enables the sense and the drive resonant frequencies to occur in close proximity of one another. This enables matched-mode operation of the device thereby ensuring maximum sensitivity.

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  • Method and apparatus for decoupling environmental and modal dependencies in inertial measurement devices

    Filed US WO2015106270

    A resonant gyroscope apparatus has a decoupling mechanism implemented with spring-like flexure members to effectively isolate an axis-symmetric bulk-acoustic wave (BAW) vibratory gyroscope from its substrate, thereby minimizing the effect that external sources of error have on offset and scale-factor.

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  • Mode-matched single proof-mass dual-axis gyroscope and method of fabrication

    Filed US US20130283911

    A single proof-mass, dual-axis gyroscope apparatus comprises a resonating body member and first and second electrodes each capacitively coupled to the resonating body member by a respective lateral capacitive air gap and a vertical capacitive air gap.

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  • Bulk acoustic wave gyroscope with spoked structure

    Filed US US20120227487

    A Coriolis-based bulk acoustic wave gyroscope includes a center-supported resonating element with capacitively-coupled drive, sense, and control electrodes. The resonating element has a first substantially solid or perforated region which is connected to the center-support by a second region characterized by a plurality of spokes or beams. When operating in a resonance state, the first region undergoes a bulk acoustic mode of vibration while the second region undergoes a flexural mode of…

    A Coriolis-based bulk acoustic wave gyroscope includes a center-supported resonating element with capacitively-coupled drive, sense, and control electrodes. The resonating element has a first substantially solid or perforated region which is connected to the center-support by a second region characterized by a plurality of spokes or beams. When operating in a resonance state, the first region undergoes a bulk acoustic mode of vibration while the second region undergoes a flexural mode of vibration.

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Honors & Awards

  • Best Student Paper Award

    IEEE Sensors Conference

    A. Sharma, M. F. Zaman, and F. Ayazi, “A Smart Angular Rate Sensor System, ” Proceedings of IEEE Sensors 2007, Atlanta, GA, Oct. 2007 (pp. 1116-1119).

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