Stop by our booth this week to learn more about how Perseus can help improve ion energy control at the wafer surface. These bias waveforms can improve your etching quality. Come visit us at #6284 to learn more.
EHT Semi
Semiconductor Manufacturing
Seattle, Washington 92 followers
Precision Pulsed Power for Semiconductors
About us
EHT Semi specializes in developing power systems for generating and controlling plasmas to improve semiconductor processing performance. Our power systems can precisely control the processing plasmas to significantly improve wafer etching performance.
- Website
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https://ehtsemi.com/
External link for EHT Semi
- Industry
- Semiconductor Manufacturing
- Company size
- 11-50 employees
- Headquarters
- Seattle, Washington
- Type
- Privately Held
- Specialties
- Precision pulsed power, Precision plasma control, Pulsed power for semiconductor, Ion energy distribution control, Plasma generation, and Plasma control
Locations
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Primary
333 Elliott Ave W
Ste 200
Seattle, Washington 98119, US
Updates
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With internal voltage and current measurements, EHT Semi power systems can determine the wafer voltage in real time. The ion energy distribution (IED) can also rapidly be calculated. Unlike RF generators that can only use power as a control parameter, our bias waveform generators can use wafer voltage and/or IED to control the process. Learn more at https://lnkd.in/gABAqist
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The EHT Semi research team is doing fantastic work that will pave the way to new tools for optimized plasma control for semiconductor manufacturing. Congrats...... #EHTSemi #precisionpulsedpower
EHT Semi was selected for a U.S. Department of Energy (DOE) SBIR Phase I, titled "Independent Electron and Ion Energy Distribution Control for Semiconductor Processing." In this program, we'll be measuring EEDs and IEDs with Perseus™. We're looking forward to sharing results during this research project that will help improve #semiconductormanufacturing.
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EHT Semi was selected for a U.S. Department of Energy (DOE) SBIR Phase I, titled "Independent Electron and Ion Energy Distribution Control for Semiconductor Processing." In this program, we'll be measuring EEDs and IEDs with Perseus™. We're looking forward to sharing results during this research project that will help improve #semiconductormanufacturing.
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Adjusting the wafer bias waveform for #semiconductor processing allows for control over the ion energy distribution. Other bias power systems offer a few states for multistate operation. EHT Semi's Perseus™ has a continuously-adjustable multistate capability, which enables the production of arbitrary ion energy distributions at the wafer surface. Learn more about multistate operation at https://lnkd.in/gzpVT5pg
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Our power systems will be part of tools that will enable the manufacturing of the next generation #semiconductor chips. The give users direct control of the distribution of ion energies reaching the wafer surface. Contact our engineers to find out how: https://ehtsemi.com/
Great visual article showing an overview of the semiconductor industry and where it's going. EHT Semi has developed power systems for plasma generation and control to improve the etching process. Process engineers will have the ability to etch smaller critical dimensions.
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We have different pulse generator options for wafer bias for #semiconductor processing. Come checkout our tutorial on the relationship between waveforms and ion energy distribution. Our engineers can help you optimize the pulse generator for your process. https://lnkd.in/gKyTmJyk
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It's exciting to see Princeton Plasma Physics Laboratory (PPPL) and their collaborators continue to advance the capabilities of their plasma modeling code, EDIPIC. Under our DOE SBIR to improve ion control for semiconductor processing, our collaborators at North Carolina State University are using EDIPIC to help us understand how the bias waveform impacts the plasma and ion energy distribution at the wafer surface.
“Robust and reliable simulation tools that can accurately predict plasma behavior and shorten the manufacturing and design cycle of silicon chips could help the U.S. regain a leadership role in this field and maintain it for decades,” says Igor Kaganovich, a principal research physicist who leads the low-temperature modeling group at PPPL. Read more about how scientists at PPPL are developing computer simulation codes 💻 that will outperform current simulation techniques and aid the production of microchips using plasma ⚛️, the electrically charged state of matter also used in fusion research. ⬇️
Plasma scientists develop computer programs that could reduce the cost of microchips and stimulate American manufacturing
pppl.gov