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IP address: 44.220.62.211
Time: 2024-07-20T19:00:10Z
URL: https://scholar.google.com/scholar?q=Sano%20Y%2C%20Masuda%20T%2C%20Kamisaka%20S%2C%20Mimura%20H%2C%20Matsuyama%20S%2C%20Yamauchi%20K%20(2008b)%20Improvement%20of%20thickness%20uniformity%20of%20SOI%20by%20numerically%20controlled%20sacrificial%20oxidation%20using%20atmospheric-pressure%20plasma.%20IEEE%20Int%20SOI%20Conf%20%3A165%E2%80%93166