Manufacturing method of high frequency quartz oscillators over 1 GHz
Y Nagaura, S Yokomizo�- …�of the 1999 Joint Meeting of the�…, 1999 - ieeexplore.ieee.org
Y Nagaura, S Yokomizo
Proceedings of the 1999 Joint Meeting of the European Frequency�…, 1999•ieeexplore.ieee.orgIn addition to the conventional methods of chemical etching and mechanical polishing,
reactive ion etching (RIE) is proposed as a major production method of high frequency
quartz oscillators. We have found that RIE, with the selection of a condition, is useful in the
production of quartz oscillators, and that mechanical polishing is effective for the
improvement of the characteristic.
reactive ion etching (RIE) is proposed as a major production method of high frequency
quartz oscillators. We have found that RIE, with the selection of a condition, is useful in the
production of quartz oscillators, and that mechanical polishing is effective for the
improvement of the characteristic.
In addition to the conventional methods of chemical etching and mechanical polishing, reactive ion etching (RIE) is proposed as a major production method of high frequency quartz oscillators. We have found that RIE, with the selection of a condition, is useful in the production of quartz oscillators, and that mechanical polishing is effective for the improvement of the characteristic.
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