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| Open AccessControlled condensation by liquid contact-induced adaptations of molecular conformations in self-assembled monolayers
Surface condensation is predetermined and is typically adjusted by chemical or topographical surface modification. Here, the authors report on a strategy to control the surface condensation behavior by adjusting molecular conformations in self-assembled monolayers.
- Guoying Bai
- , Haiyan Zhang
- & Yufeng Liu
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Article
| Open AccessRewritable printing of ionic liquid nanofilm utilizing focused ion beam induced film wetting
With a helium focused ion beam, an ionic liquid can undergo induced wetting to flow into a desired pattern on a surface in a controllable, rewriteable manner. Combined with electrochemical deposition, patterned solid materials can be produced.
- Haohao Gu
- , Kaixin Meng
- & Hao Wang
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Article
| Open AccessCrosslinking-induced patterning of MOFs by direct photo- and electron-beam lithography
Precise and scalable patterning is essential for the use of metal-organic frameworks (MOFs) in solid-state electronics and photonics. Here, the authors report on resistance-free, direct photo- and electron-beam lithography of MOF films using crosslinking chemistry.
- Xiaoli Tian
- , Fu Li
- & Jinghong Li
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Article
| Open AccessLight and matter co-confined multi-photon lithography
Mask-free multi-photon lithography allows the straightforward fabrication of nanostructures, but high precision and good resolution can be challenging to achieve. Here, the authors report a combination of photo-inhibition and chemical quenchers for improved lithography performance.
- Lingling Guan
- , Chun Cao
- & Xu Liu
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Article
| Open AccessArea-selective atomic layer deposition on 2D monolayer lateral superlattices
Area selective atomic layer deposition (AS-ALD) has been recently proposed as a controlled growth method, but the patterning resolution and selectivity require improvements. Here, the authors report a superlattice-based AS-ALD method to deposit various materials onto 2D MoS2-MoSe2 lateral superlattices, with a minimum half-pitch size of ~ 10 nm.
- Jeongwon Park
- , Seung Jae Kwak
- & Kibum Kang
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Article
| Open AccessSwitchable tribology of ferroelectrics
The interaction of flexoelectric polarization arising from strain gradients with ferroelectricity impacts tribological properties and facilitates fine physical lithography without masks or chemicals, with potential applications in various fields.
- Seongwoo Cho
- , Iaroslav Gaponenko
- & Seungbum Hong
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Article
| Open AccessRoll-to-plate 0.1-second shear-rolling process at elevated temperature for highly aligned nanopatterns
In this work, authors demonstrate a 0.1-second shear rolling process capable of shearing without peeling up to 280 °C. This enables roll-to-plate fabrication of highly and unidirectionally aligned sub−10 nm block copolymer patterns over large wafer areas.
- Junghyun Cho
- , Jinwoo Oh
- & Jeong Gon Son
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Article
| Open AccessMetal-organic framework template-guided electrochemical lithography on substrates for SERS sensing applications
Templating method holds great promise for fabricating surface nanopatterns. Here authors present a guiding growth mode using metal-organic framework microparticles as templates during metal electrodeposition, where metals exclusively grow underneath the microparticles.
- Youyou Lu
- , Xuan Zhang
- & Shikuan Yang
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Article
| Open AccessMetal 3D nanoprinting with coupled fields
Manufacturing metallized arrays of 3D nanoarchitectures is generally limited by existing lithographic methods. Here, by manipulating applied electric and flow fields, authors demonstrate fast 3D nanoprinting of nanostructured arrays of multiple materials and geometries over millimetre-scale areas.
- Bingyan Liu
- , Shirong Liu
- & Jicheng Feng
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Article
| Open AccessNon-destructive erosive wear monitoring of multi-layer coatings using AI-enabled differential split ring resonator based system
Real-time monitoring of coatings erosive wear is critical to mitigate safety and financial concerns in many applications. Here, authors show a non-destructive inspection system with AI-enabled microwave resonators and a smart monitoring circuitry to identify and estimate wear depth and rate of eroded layers.
- Vishal Balasubramanian
- , Omid Niksan
- & Mohammad H. Zarifi
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Article
| Open AccessSelf-aligned patterning of tantalum oxide on Cu/SiO2 through redox-coupled inherently selective atomic layer deposition
‘Atomic-scale precision alignment is a bottleneck in the fabrication of next generation nanoelectronics. Here, the authors used redox-coupled inherently selective atomic layer deposition of tantalum oxide on Cu/SiO2 and achieved 100% selective deposition on SiO2 and no observable growth on copper.’
- Yicheng Li
- , Zilian Qi
- & Rong Chen
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Article
| Open AccessQuasi-seamless stitching for large-area micropatterned surfaces enabled by Fourier spectral analysis of moiré patterns
A challenge in making a flexible mold stamp using roll-to-roll nanoimprint lithography is to increase area while minimizing perceptible seams. Here, based on Fourier spectral analysis of moiré patterns resulting from superposed identical patterns, a method that enables the fabrication of scalable, quasi-seamless functional surfaces without the use of alignment marks is proposed.
- Woo Young Kim
- , Bo Wook Seo
- & Young Tae Cho
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Article
| Open AccessRandom fractal-enabled physical unclonable functions with dynamic AI authentication
In order to be used on a large scale, unclonable tags for anti-counterfeiting should allow mass production at low cost, as well as fast and easy authentication. Here, the authors show how to use one-step annealing of gold films to quickly realize robust tags with high capacity, allowing fast deep-learning based authentication via smartphone readout.
- Ningfei Sun
- , Ziyu Chen
- & Qian Liu
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Article
| Open AccessUltrafast 3D nanofabrication via digital holography
The application of two-photon lithography has been limited by the low writing speed. The authors reported a multi-focus improved lithography platform that employs up to 2000 laser foci to perform parallel fabrication with 90 nm resolution via optimised polymerisation and single-pulse printing strategy.
- Wenqi Ouyang
- , Xiayi Xu
- & Shih-Chi Chen
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Article
| Open AccessTop-down patterning of topological surface and edge states using a focused ion beam
Topological edge states offer the prospect of dissipationless transport for nanoelectronics, but a precise method to spatially engineer such nanoscale conducting channels is still lacking. Here, the authors demonstrate patterning of topological boundary states in Sb2Te3 using a focused ion beam to create amorphous, topologically trivial regions.
- Abdulhakim Bake
- , Qi Zhang
- & David Cortie
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Article
| Open AccessObservation of enhanced nanoscale creep flow of crystalline metals enabled by controlling surface wettability
Solid-solid interface friction usually becomes the bottleneck at micro/nanoscale. Here, Xiang and Liu show that the nanoscale creep flow rate of crystalline metals can increase by orders of magnitude when the contact metal is in diffusion deformation and the thermally activated boundary slip is active.
- Jun-Xiang Xiang
- & Ze Liu
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Article
| Open AccessPrecise atom manipulation through deep reinforcement learning
Engineering quantum states requires precise manipulations at the atomic level. Here, the authors use deep reinforcement learning to manipulate Ag adatoms on Ag surfaces, which combined with path planning algorithms enables autonomous atomic assembly.
- I-Ju Chen
- , Markus Aapro
- & Adam S. Foster
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Article
| Open AccessCovalent transfer of chemical gradients onto a graphenic surface with 2D and 3D control
Covalent modification is an essential chemical method for altering the physicochemical properties of material interfaces. Here, the authors show that the no-slip conditions in microfluidic devices grant spatiotemporal control over molecular grafting.
- Yuanzhi Xia
- , Semih Sevim
- & Josep Puigmartí-Luis
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Article
| Open AccessEngineering high quality graphene superlattices via ion milled ultra-thin etching masks
Focused-ion beam (FIB) lithography enables high-resolution nanopatterning of 2D materials, but usually introduces significant damage. Here, the authors report a FIB-based fabrication technique to obtain high quality graphene superlattices with 18-nm pitch, which exhibit electronic transport properties similar to those of natural moiré systems.
- David Barcons Ruiz
- , Hanan Herzig Sheinfux
- & Frank H. L. Koppens
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Article
| Open AccessHigh-speed, scanned laser structuring of multi-layered eco/bioresorbable materials for advanced electronic systems
Designing and manufacturing eco/bioresorbable electronic systems remains a challenge. The authors introduce a picosecond-pulsed laser-based scheme that exploits controlled patterning, thinning, and/or cutting to manipulate multilayers of eco/bioresorbable materials for a wide range of advanced electronic systems.
- Quansan Yang
- , Ziying Hu
- & John A. Rogers
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Article
| Open AccessTunable metasurfaces via the humidity responsive swelling of single-step imprinted polyvinyl alcohol nanostructures
PVA is a hydrogel that has attractive swelling properties for use in tunable photonic applications. Here, the authors exploit PVA with nanoimprint lithography to realize multiplexed optical encryption metasurfaces to display, hide, and destroy encrypted information.
- Byoungsu Ko
- , Trevon Badloe
- & Junsuk Rho
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Article
| Open AccessFrom radial to unidirectional water pumping in zeta-potential modulated Nafion nanostructures
Chemically propelled micropumps are wireless fluid flow driving systems with many potential applications. Here, the authors report a self-driven reusable Nafion micropump fueled by different salt cations in a wide range of concentrations that triggers both radial and unidirectional flows, showing efficient water remediation capabilities.
- María J. Esplandiu
- , David Reguera
- & Jordi Fraxedas
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Article
| Open AccessPolygonal non-wetting droplets on microtextured surfaces
Exploring the interactions between liquids and solids is critical for improving control over fluidic systems. Here, authors develop an active way to tailor various polygonal shapes of non-wetting droplet on microtextured surfaces, resulting from the anisotropic energy barriers of the contact line.
- Jing Lou
- , Songlin Shi
- & Cunjing Lv
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Article
| Open AccessRapid meniscus-guided printing of stable semi-solid-state liquid metal microgranular-particle for soft electronics
In this article, meniscus-guided printing of polyelectrolyte-attached liquid metal particles to simultaneously achieve mechanical stability and initial electrical conductivity at high resolution is introduced.
- Gun-Hee Lee
- , Ye Rim Lee
- & Steve Park
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Article
| Open AccessWell-defined nanostructuring with designable anodic aluminum oxide template
Well-defined nanostructuring is a feasible concept to achieve nanostructured arrays with unique properties. Here the authors report fabrication of designable anodic aluminum oxide templates with controllable in-plane and out-of-plane shapes, sizes, spatial configurations, and pore combinations.
- Rui Xu
- , Zhiqiang Zeng
- & Yong Lei
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Article
| Open Access3D nanoprinting via spatially controlled assembly and polymerization
Additive manufacturing methods at the macroscale have seen significant advances in recent times, but advances for the bottom-up formation of nanoscale polymeric features are yet to be realized. Here, the authors demonstrate that rapid crosslinking of an AFM delivered norbornene crosslinker in presence of a surface-tethered metathesis catalysts facilitates the curing of delivered material in an extremely rapid fashion
- Thomas G. Pattison
- , Shuo Wang
- & Greg G. Qiao
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Article
| Open AccessPerovskite microcells fabricated using swelling-induced crack propagation for colored solar windows
Perovskite microcells can be applied to various types of optoelectronic devices. Here, authors report high efficiency perovskite microcells fabricated using swelling-induced crack propagation and demonstrate solar windows using the microcells.
- Woongchan Lee
- , Young Jin Yoo
- & Dae-Hyeong Kim
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Article
| Open AccessWafer-scale epitaxial modulation of quantum dot density
Nucleation control of self-assembled quantum dots is challenging. Here, the authors employ conventional molecular beam epitaxy to achieve wafer-scale density modulation of high-quality quantum dots with tunable periodicity on unpatterned substrates.
- N. Bart
- , C. Dangel
- & A. Ludwig
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Article
| Open AccessDirect-laser writing for subnanometer focusing and single-molecule imaging
Focus-locking improves localization precision in single-molecule microscopy, but fiducials are often deposited at random and provide limited 3D compensation. Here, the authors fabricate 3D optical fiducials with nanometer accuracy by two-photon direct laser writing, and demonstrate isotropic 3D focus locking.
- Simao Coelho
- , Jongho Baek
- & Katharina Gaus
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Article
| Open AccessSolvent-free bottom-up patterning of zeolitic imidazolate frameworks
There is a long-standing interest in the development of patterning process for porous materials. Here, the authors report a solvent-free bottom-up approach for the patterning of zeolitic imidazolate frameworks; well-resolved patterns with features down to the scale of 100 nm can be achieved.
- Yurun Miao
- , Dennis T. Lee
- & Michael Tsapatsis
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Article
| Open AccessSpontaneous dewetting transitions of droplets during icing & melting cycle
Despite promising for anti-icing applications, structured superhydrophobic surfaces usually lose their hydrophobicity after a few icing/melting cycles. Here, authors investigate specific structured surfaces and air bubbles on frozen ice droplets to propose three criteria to enable dewetting transitions.
- Lizhong Wang
- , Ze Tian
- & Minlin Zhong
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Article
| Open Access3D electron-beam writing at sub-15 nm resolution using spider silk as a resist
Electron beam lithography (EBL) is renowned to provide fabrication resolution in the deep nanometer scale but their incapability of arbitrary 3D nanofabrication poses a major limitation to the technique. Here, the authors demonstrate a manufacturing technique of functional 3d nanostructures at a resolution of sub-15 nm using voltage-regulated 3d EBL.
- Nan Qin
- , Zhi-Gang Qian
- & Tiger H. Tao
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Article
| Open AccessPhase-to-pattern inverse design paradigm for fast realization of functional metasurfaces via transfer learning
The design and optimization of a metasurface is a computationally- and time-consuming effort. Here, the authors propose a neural network-based algorithm for functional metasurface design, and demonstrate it for some functional metasurfaces.
- Ruichao Zhu
- , Tianshuo Qiu
- & Shaobo Qu
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Article
| Open AccessHigh-resolution combinatorial patterning of functional nanoparticles
Precise patterning of functional nanoparticles can provide a powerful tool for next-generation macroscale devices. Here, the authors report a reliable nanoprinting technique that can pattern various functional nanoparticles on the substrate with a 200 nm pitch and 10 nm position accuracy, and above the millimeter scale.
- Xing Xing
- , Zaiqin Man
- & Zhenda Lu
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Article
| Open AccessBoundary-directed epitaxy of block copolymers
Directing the position, orientation, and long-range lateral order of block copolymer domains to produce technologically-useful, sublithographic patterns is a challenge. Here, the authors present a promising approach to overcome the challenge by directing assembly using spatial boundaries between planar, low-resolution regions on a surface with different composition.
- Robert M. Jacobberger
- , Vikram Thapar
- & Michael S. Arnold
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Article
| Open AccessDesigner patterned functional fibers via direct imprinting in thermal drawing
Creating micro/nanostructures on fibers is beneficial to many fiber-based devices, which remains a challenge in large-scale fabrication due to elongation and reflow. Here, the authors demonstrate a method for generating high-resolution, arbitrarily designed surface patterns on fiber during the thermal drawing process.
- Zhe Wang
- , Tingting Wu
- & Lei Wei
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Article
| Open AccessSpatial defects nanoengineering for bipolar conductivity in MoS2
Bipolar conductivity is fundamental for electronic devices based on two-dimensional semiconductors. Here, the authors report on-demand p- and n-doping of monolayer MoS2 via defects engineering using thermochemical scanning probe lithography, and achieve a p-n junction with rectification ratio over 104.
- Xiaorui Zheng
- , Annalisa Calò
- & Elisa Riedo
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Article
| Open AccessThermodynamic-driven polychromatic quantum dot patterning for light-emitting diodes beyond eye-limiting resolution
Designing quantum dot light emitting diodes with full-colour pixel arrays with sub-micron feature size remains a challenge. Here, the authors demonstrate red-green-blue quantum dots arrays with resolutions up to 368 pixels per degree by leveraging thermodynamic-driven immersion transfer-printing.
- Tae Won Nam
- , Moohyun Kim
- & Yeon Sik Jung
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Article
| Open AccessSingle-step manufacturing of hierarchical dielectric metalens in the visible
Current metalenses are far from commercialization due to fabrication cost and low throughput. Here, the authors use a UV-curable resin as a matrix for direct pattern replication by the composite and TiO2 nanoparticles to increase the refractive index of the composite, allowing dielectric metalenses to be manufactured in a single step.
- Gwanho Yoon
- , Kwan Kim
- & Junsuk Rho
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Article
| Open AccessNear-field sub-diffraction photolithography with an elastomeric photomask
Photolithography is an established microfabrication technique but commonly uses costly shortwavelength light sources to achieve high resolution. Here the authors use metal patterns embedded in a flexible elastomer photomask with mechanical robustness for generation of subdiffraction patterns as a cost effective near-field optical printing approach.
- Sangyoon Paik
- , Gwangmook Kim
- & Wooyoung Shim
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Article
| Open AccessThe dualism between adatom- and vacancy-based single crystal growth models
In homoepitaxial crystal growth, four established modes describe atom deposition on a single crystal surface. Here the authors present a model that shows that, for each adatom growth mode, there exists an analogous but inverse version for vacancy growth. This also applies to combined growth.
- Marcel J. Rost
- , Leon Jacobse
- & Marc T. M. Koper
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Article
| Open AccessDisentangling charge carrier from photothermal effects in plasmonic metal nanostructures
Confidently separating the photothermal effect from the generation of energetic charge carriers and quantifying their relative contribution to chemical reactions remain a great challenge in plasmon-mediated chemical reactions. Here, authors describe a strategy based on the construction of a plasmonic electrode coupled with photoelectrochemistry to quantitatively disentangle these two effects.
- Chao Zhan
- , Bo-Wen Liu
- & Zhong-Qun Tian
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Article
| Open AccessRealization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy
Fabrication of wafer-scale nanogratings for X-ray spectroscopy is difficult especially for very high line densities. The authors use vacancy epitaxy to fabricate sub-50-nm-periodicity gratings, coated with multilayers for efficient operation, for use in ultra-high resolution x-ray spectroscopy.
- Qiushi Huang
- , Qi jia
- & Xin Ou
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Article
| Open AccessNanoprinting organic molecules at the quantum level
Integration of emitters for nanophotonic applications requires precise control over their position and orientation. Here, Hail et al. demonstrate the positioning of a single and a small number of oriented molecules with subwavelength accuracy bu direct non-contact electrohydrodynamic nanoprinting.
- Claudio U. Hail
- , Christian Höller
- & Hadi Eghlidi
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Article
| Open AccessCascaded collimator for atomic beams traveling in planar silicon devices
Bringing atomic beam technology to the chip scale is challenging due to the long distance required to filter the velocity distribution. Here, the authors report an engineering strategy for on-chip filtering of the velocity profile of atomic beams by fabricating planar, etched microchannel arrays.
- Chao Li
- , Xiao Chai
- & C. Raman
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Article
| Open AccessEnhanced voltage generation through electrolyte flow on liquid-filled surfaces
Superhydrophobic surfaces are expected to increase streaming potential, but are hindered by the presence of air. Here the authors enhance streaming potential by flowing high-dielectric salt water over liquid-filled surfaces infiltrated with low-dielectric liquid, harnessing electric slip and surface charge.
- B. Fan
- , A. Bhattacharya
- & P. R. Bandaru
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Article
| Open AccessLithography for robust and editable atomic-scale silicon devices and memories
Manipulation at the atomic scale comes with a trade-off between simplicity and thermal stability. Here, Achal et al. demonstrate improved automated hydrogen lithography and repassivation, enabling error-corrected atomic writing of large-scale structures/memories that are stable at room temperature.
- Roshan Achal
- , Mohammad Rashidi
- & Robert A. Wolkow
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Article
| Open AccessReplica molding-based nanopatterning of tribocharge on elastomer with application to electrohydrodynamic nanolithography
Tribocharging, or the buildup of charge on surfaces after they are rubbed together, can play unusual roles in material behavior, yet it is unclear how nanostructuring impacts charge buildup and distribution. Here, authors use replica molding to localize and pattern charges around nanocup rims.
- Qiang Li
- , Akshit Peer
- & Jaeyoun Kim
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Article
| Open AccessDirecting lateral growth of lithium dendrites in micro-compartmented anode arrays for safe lithium metal batteries
The formation of lithium dendrites remains a great challenge to lithium metal batteries. Here the authors show an anode design to laterally direct the dendrite growth inside the compartments, providing a feasible post-mortem solution to batteries with lithium dendrites already present.
- Peichao Zou
- , Yang Wang
- & Cheng Yang