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Repulsive magnetic field–assisted laser-induced plasma micromachining for high-quality microfabrication

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Abstract

Surface micro-/nanostructures are widely used in the fabrication of various functional microsystems. Laser-induced plasma micromachining can greatly improve surface quality in terms of recast layers and thermal defects compared with laser direct writing. Magnetic field has the ability to constrain plasma diffusion and can ensure the stability of laser-induced plasma processing. This paper compares the effects of laser direct–writing processing and laser-induced plasma processing of single-crystal silicon at the micro-/nanoscale, and emphatically analyzes the material removal mechanism of repulsive magnetic field–assisted laser-induced plasma micromachining. It is shown that the volume of the laser-induced plasma was constrained under the influence of Lorentz force, a high-quality smooth microgroove without thermal defects was obtained, and its line width was reduced by 30%.

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Data availability

The raw data required to reproduce these findings are available to download from https://doi.org/10.17632/bfbd3wn8sk.1.

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Funding

This work in the present research was supported by the National Natural Science Foundation of China (Grant No. 51705233) and Shenzhen Key Laboratory for Additive Manufacturing of High-performance Materials.

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Authors and Affiliations

  1. Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen, China

    Hongwei Tang, Pei Qiu, Ruixing Cao, Jianlin Zhuang & Shaolin Xu

Authors
  1. Hongwei Tang
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  2. Pei Qiu
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  3. Ruixing Cao
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  4. Jianlin Zhuang
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  5. Shaolin Xu
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Corresponding author

Correspondence to Shaolin Xu.

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Tang, H., Qiu, P., Cao, R. et al. Repulsive magnetic field–assisted laser-induced plasma micromachining for high-quality microfabrication. Int J Adv Manuf Technol 102, 2223–2229 (2019). https://doi.org/10.1007/s00170-019-03370-5

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  • DOI: https://doi.org/10.1007/s00170-019-03370-5

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