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Focused Ion Beam (FIB) Technology for Micro- and Nanoscale Fabrications

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FIB Nanostructures

Part of the book series: Lecture Notes in Nanoscale Science and Technology ((LNNST,volume 20))

Abstract

The focused ion beam (FIB) technology has become increasingly popular fabrication and characterization tool across many research areas from nanotechnology, material science, microelectronic industry, life science, biology, and medicine. FIB was specially recognized as an attractive tool or the fabrication of micro- and nanostructures with complex geometries and shapes. This chapter presents the basic introduction of FIB dual-beam system and its operation modes, followed by description of instrument in more details. The review has emphasis on FIB fabrication of nanostructures by milling and deposition methods with particular focus on fabrication of nanopatterns and nanopore arrays. Various efforts to fabricate micro- and nanoscale structure and geometrically complex structure are described. Finally, recent developments of applications of FIB in different areas of material science and life science are briefly reviewed.

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Acknowledgments

The authors acknowledge the financial support of the Australian Research Council (FT 110100711, LP 100100272) and the University of Adelaide for this work. The author also thanks Mr. L. Green from Adelaide Microscopy and FEI Company for technical and FIB imaging support.

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Authors and Affiliations

  1. School of Chemical Engineering, The University of Adelaide, North Engineering Building, Adelaide, SA, 5005, Australia

    Krishna Kant Ph.D. & Dusan Losic

  2. School of Chemical and Physical Sciences, Flinders University of South Australia, Bedford Park, SA, 5042, Australia

    Krishna Kant Ph.D.

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  1. Krishna Kant Ph.D.
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  2. Dusan Losic
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Correspondence to Dusan Losic .

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  1. State Key Laboratory of Electronic, University of Electronic Science and Technology, Chengdu, People's Republic of China

    Zhiming M. Wang

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Kant, K., Losic, D. (2013). Focused Ion Beam (FIB) Technology for Micro- and Nanoscale Fabrications. In: Wang, Z. (eds) FIB Nanostructures. Lecture Notes in Nanoscale Science and Technology, vol 20. Springer, Cham. https://doi.org/10.1007/978-3-319-02874-3_1

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