Abstract
We report on the development of commercially fabricated multi-chronic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments. The orders of magnitude increase in detector count for next-generation CMB experiments require a new approach in detector wafer production to increase fabrication throughput. We describe collaborative efforts with a commercial superconductor electronics fabrication facility (SeeQC, Inc.) to fabricate antenna-coupled TES bolometer detectors. We have successfully fabricated an operational dual-polarization, dichroic sinuous antenna-coupled TES detector array on a 150-mm-diameter wafer. The fabricated detector arrays have average yield of 95% and excellent uniformity across the wafer. Both RF characteristics and TES bolometer properties are suitable for CMB observations. We successfully fabricated different types of TES bolometers optimized for frequency multiplexing readout, time-domain multiplexing readout, and microwave SQUID multiplexing readout. We also demonstrated high production throughput. We discuss the motivation, design considerations, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.
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Notes
SeeQC, Inc. spun off from Hypres, Inc. in 2019.
References
K.N. Abazajian et al., CMB-S4 Science Book, 1st edn (2016). arXiv:1907.04473 [astro-ph.IM]
K. Abazajian et al., CMB-S4 Science Case, Reference Design, and Project Plan (2019). arXiv:1907.04473 [astro-ph.IM]
Concept Definition Task Force. Cosmic Microwave Background Stage 4 Concept Dedinition Task Force (2017). https://cmb-s4.org/CMB-S4workshops/images/CMBS4_CDT_final.pdf. Accessed 4 Nov 2017
Darcy Barron et al., Optimization study for the experimental configuration of CMB-s4. J. Cosmol. Astropart. Phys. 2018(02), 009–009 (2018)
Aritoki Suzuki et al., Commercialization of micro-fabrication of antenna-coupled transition edge sensor bolometer detectors for studies of the cosmic microwave background. JLTP 193(5), 744–751 (2018)
Benjamin Westbrook et al., The polarbear-2 and simons array focal plane fabrication status. JLTP 193(5), 758–770 (2018)
N. Galitzki et al., The simons observatory: instrument overview, in SPIE Proceedings, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy IX, 10708 (2018)
Dale Li et al., Almn transition edge sensors for advanced actpol. J. Low Temp. Phys. 184(1), 66–73 (2016)
A. Suzuki, Multichroic bolometric detector architecture for cosmic microwave background polarimetry experiments. Ph.D. Thesis, University of California, Berkeley (2013)
Acknowledgements
This work was supported by: Early Career Research Program, Office of Science, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. Small Business Innovation Research (SBIR), Office of Science, of the U.S. Department of Energy under Award Nos. DE-SC0017818 and DE-SC0018711. Simons Observatory.
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Suzuki, A., Cothard, N., Lee, A.T. et al. Commercially Fabricated Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Next-Generation Cosmic Microwave Background Polarimetry Experiment. J Low Temp Phys 199, 1158–1166 (2020). https://doi.org/10.1007/s10909-019-02325-0
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DOI: https://doi.org/10.1007/s10909-019-02325-0